Spot-spectrum confocal displacement sensor

Description

Parameters
Sensor Head
Model*7	Reference Distance*1	Measurement Range		Angle*2	Spot type*3		Repeat- ability		Linear Error*5	Outer Diameter *Length		Weight	Minimum Measurabl e Thickness		Temperature Characteristics	IP Grade
C100B	8mm	±0.05mm		±46.5。	Φ2.7μm/5.4μm/43.2μm		3nm		<±0.03μm	Φ40*111.5mm		256g	5%ofF.S.		<0.03% F.S./。C	IP40
C400	10mm	±0.2mm		±43。	Φ7μm/14μm/112μm		12nm		<±0.12μm	Φ40*99.4mm		186g
C600	6.5mm	±0.3mm		±32.5。	Φ8μm/16μm/128μm		16nm		<±0.18μm	Φ20*110mm		73g
C1200	20mm	±0.6mm		±32。	Φ9.5μm/19μm/152μm		30nm		<±0.3μm	Φ36*106.3mm		182g
C2000	50mm	±1mm		±14。	Φ20μm/40μm/320μm		85nm		<±0.6μm	Φ34*90.7mm		162g	10%ofF.S.		≈0.1% F.S./。C
C2400	9mm	±1.2mm		±60。	Φ5.5μm/11μm/88μm		45nm		<±0.48μm	Φ94*267.5mm		2350g	5%ofF.S.		<0.03% F.S./。C
C2600	15mm	±1.3mm		±31。	Φ9μm/18μm/144μm		50nm		<±0.3μm	Φ36*97.9mm		228g
C2600H	15mm	±1.3mm		±31。	Φ9μm/18μm/144μm		50nm		<±0.3μm	Φ36*97.9mm		228g
C3000	7mm	±1.5mm		±12.5。	Φ20μm		100nm		<±0.6μm	Φ8*65.7mm		23g*6	10%ofF.S.		≈0.05% F.S./。C	IP67
C4000N	14.5mm	±2mm		±21。	Φ12μm/24μm/192μm		100nm		<±0.8μm	Φ32*158.8mm		238g	5%ofF.S.		<0.03% F.S./。C	IP40
C4000F	38mm	±2mm		±21。	Φ16μm/32μm/256μm		100nm		<±0.8μm	Φ36*126.1mm		226g
C6000	40mm	±3mm		±14。	Φ22μm/44μm/352μm		140nm		<±1.2μm	Φ30*65.3mm		112g			≈0.05% F.S./。C
C7000	45mm	±3.5mm		±15.5。	Φ20μm/40μm/320μm		140nm		<±1.4μm	Φ36*84.2mm		200g			<0.03% F.S./。C
C7000L	47mm	±3.5mm		±21。	Φ16μm/32μm/256μm		140nm		<±1.4μm	Φ52*207mm		784g
C7000S	70mm	±3.5mm		±10。	Φ25μm/50μm/400μm		200nm		<±1.4μm	Φ30*84.2mm		130g
C8000	54.5mm	±4mm		±7.3。	Φ34μm / 68μm / 544μm		250nm		<±1.6μm	Φ23*50mm		29g
C8000(Bent)	54.5mm	±4mm		±7.3。	Φ34μm / 68μm / 544μm		250nm		<±1.6μm	Φ23*48.5mm
C10000	50mm	±5mm		±13。	Φ20μm/40μm/320μm		250nm		<±2μm	Φ36*84mm		203g
C10000H	50mm	±5mm		±13。	Φ20μm/40μm/320μm		250nm		<±2μm	Φ36*84mm		/
C16000	55mm	±8mm		±15.3。	Φ15μm/30μm/240μm		300nm		<±2μm	Φ60*211.1mm		1180g
C20000	60mm	±10mm		±10.5。	Φ25μm/50μm/400μm		290nm		<±2μm	Φ36*163mm		310g
C20000H	60mm	±10mm		±10.5。	Φ25μm/50μm/400μm		290nm		<±2μm	Φ36*163mm		670g
C50000	100mm	±25mm		±9.5。	Φ25μm/50μm/400μm		850nm		<±5μm	Φ60*217.3mm		1154g
CR1500	Axial:3.92mm	±0.75mm		±14。	Φ20μm		80nm		<±0.3μm	Φ8*68.8mm		23g*6	10%ofF.S.
	Radial:5.75mm									Φ8*70.2mm
CR1500N	Axial:1.7mm	±0.75mm		±12。	Φ17μm		100nm		<±0.75μm	Φ3.8*85mm		23g*6
	Radial:3mm
CR4000	Axial:4.7mm	±2mm		±12.5。	Φ20μm		100nm		<±1.2μm	Φ8*73.1mm		59g*6
	Radial:8mm
CR5000	Axial:6.75mm	±2.5mm		±13。	Φ19μm		100nm		<±1μm	Φ12*94.6mm		37g*6			<0.02% F.S./。C
	Radial:12mm
*1 Calculated from the center position of the measurement range; *2 Tilt test using standard flat mirror at 1kHz Sampling Rate;
*3 Measurement of sharp glass edges, verified with a sub-micron positioning accuracy motion platform and laser interferometer as the displacement reference, the spot diameter values correspond to the diameters of small spot/large spot/four-spot pattern;
*4 Measurement of standard silver-coated mirror, 1kHz without averaging, root mean square deviation of 10,000 continuous data sets; *5 Calibration verification using high-precision nanoscale laser interferometer;
*6 This head model includes a 3m tail cable, and the weight in the table includes the weight of the cable;
*7 The CR series is available in two configurations: axial and radial light emission. The different suffixes are distinguished as follows:N for near reference distance,F for far reference distance,S for small size,L for Large size,H for high-temperature version.
Controller(CC-)
Model						CCS					CCD			CCF
Head Connection Capacity						1					2			4
Sampling Rate						1 channel: Max.10 kHz; 2 channels: Max.5 kHz; 4 channels: Max.2.5 kHz
Input Po比			Encoder Input			AB / ABZ encoder input, configurable for trigger
			Trigger Signal Input			Pulse / Level trigger
Output Po比			Digital Signal Output			Alarm output, comparator output (Configurable as comparator output or data invalid warning)
			Analog Signal Output			Linear ±10 V analog voltage output / 4~20 mA analog current output (Optional)
Industrial Interface			Ethernet			100BASE-TX
			USB			Complies with USB2.0 Full-speed standard
			RS-485			Modbus protocol, 19200~115200 baud rate
			EtherCAT			\
Measurement & Control Software			Host Computer Software			TSConfocalStudio measurement & control software
			SDK			C++&C#SDK
08

	\ \ Parameters
(Continued table)
Rated Power			Supply Voltage			24VDC±10%
			Current Consumption			0.4A
Environmental Tolerance			Operating Temperature			0 to +50oC
			Relative Humidity			20 to 85% RH(No condensation)
Weight						2000g
Controller(CCH)
Model				CCH
Head Connection Capacity				Suppo忙s up to 16 sensor heads connected simultaneously.
Sampling Rate				1 Channel: Max. 20 kHz; 2 Channel:Max. 18 kHz; 4 Channel: Max. 12.5 kHz; 6 Channel: Max. 10 kHz; 6 Channel: Max. 10 kHz; 8 Channel: Max. 8 kHz; 12 Channels: Max. 6 kHz; 16 Channel: Max. 4 kHz
Input Po比		Encoder Input		AB / ABZ encoder input, configurable for trigger
		Trigger Signal Input		Pulse / Level trigger
Output Po比		Digital Signal Output		Alarm output, comparator output (configurable as comparator output or data invalid warning)
		Analog Signal Output		Linear 0~5V/0~10V/±5V/±10V analog voltage output / 4~20mA analog current output (Optional)
Industrial Interface		Ethernet		1000/100Mbps
		USB		USB2.0 High-speed (480Mbps)
		RS-485		Modbus protocol, 19200~115200 baud rate
		EtherCAT		100Mbps(Optional)
Measurement & Control Software		Host Computer Software		TSConfocalStudio measurement & control software
		SDK		C++&C#SDK
Rated Power		Supply Voltage		24 VDC±10%
		Current Consumption		0.5A (1 channel), 4A (16 channels) ,recommended power supply 24V 6A or above
Environmental Tolerance		Operating Temperature		0 to +50oC
		Relative Humidity		20 to 85% RH(No condensation)
Weight				Approx.2800g(Related channel number & configuration)
Controller(CP-*)
Model					CPS / CPS-L			CPD / CPD-L	CPF
Head Connection Capacity					1			2	4
Sampling Rate					1 channel: Max.32 kHz; 2 channels: Max.16 kHz; 4 channels: Max.8 kHz
Input Po比		Encoder Input			AB / ABZ encoder input, configurable for trigger
		Trigger Signal Input			Pulse / Level trigger
Output Po比		Digital Signal Output			Alarm output, comparator output (Configurable as comparator output or data invalid warning)
		Analog Signal Output			Linear ±10 V analog voltage output / 4~20 mA analog current output (Optional)
Industrial Interface		Ethernet			100BASE-TX
		USB			USB2.0 High-speed (480Mbps)
		RS-485			Modbus protocol, 19200~115200 baud rate
		EtherCAT			100Mbps(Optional)
Measurement & Control Software		Host Computer Software			TSConfocalStudio measurement & control software
		SDK			C++&C#SDK
Rated Power		Supply Voltage			24 VDC±10%
		Current Consumption			1.0 A
Environmental Tolerance		Operating Temperature			0 to +50oC
		Relative Humidity			20 to 85% RH(No condensation)
Weight					3200 g
* This model is a new product. The drawings are still being perfected丿 and the actual parameters may vary slightly. The contract shall prevail.
						09

Applications of Chromatic Confocal Displacement Sensors

Our high-precision chromatic confocal displacement sensor provides non-contact, ultra-precise measurement solutions across various advanced manufacturing and optical assembly fields, including:</p >

1. Transparent Wafer Thickness Measurement

In semiconductor and optical wafer manufacturing, measuring the precise thickness of transparent substrates (such as silicon, glass, quartz, and sapphire wafers) is critical. Thanks to its spectral chromatic dispersion principle, a single chromatic confocal displacement sensor can measure both the upper and lower surfaces of transparent materials simultaneously. It provides sub-nanometer thickness measurement without physical contact or thermal disruption, making it ideal for thin film thickness monitoring, wafer warpage detection, and inline quality control during polishing and grinding processes.</p >

2. Optical Transceiver and Coupler Alignment & Metrology

For optoelectronic manufacturing, the production of optical transceivers and fiber couplers requires sub-micron alignment accuracy to ensure optimal light coupling efficiency and minimize signal loss. Our chromatic confocal displacement sensor is extensively used to measure critical dimensions, air gaps, lens distances, and end-face tilts during optical assembly. Its non-contact high-frequency sampling (up to 30 kHz) guarantees precise positioning of optical fibers, PLC splitters, and transceiver components without scratching delicate optical coatings or mirror-like surfaces.</p >

3. Advanced Surface Micro-Topography & Precision Metrology

Beyond semiconductors and optical communications, these sensors are widely applied in consumer electronics, automotive optics, and precision machining to measure micro-grooves, step heights, surface roughness, and curvature on mirrored, polished, or highly angled surfaces.</p >