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Schematic diagram of high-precision point spectral confocal thickness measurement instrument for transparent glass inspection application

Spot-spectrum confocal displacement sensor

Chromatic Confocal Displacement Sensor 

Ultra-high    Repeatability  ：3nm            Ultra-high Linearity  :  ±0.02 % of F.S            Ultra-fast  Sampling Rate :  MAX  30 kHz         Ultra-large   Measurement Angle :  ±6 0°

SKU: 100 Category:

Description

[

Parameters
Sensor Head
Model*7 Reference
Distance*1		 Measurement
Range		 Angle*2 Spot type*3 Repeat-
ability		 Linear
Error*5		 Outer Diameter
*Length		 Weight Minimum
Measurabl
e Thickness		 Temperature
Characteristics		 IP
Grade
C100B 8mm ±0.05mm ±46.5。 Φ2.7μm/5.4μm/43.2μm 3nm <±0.03μm Φ40*111.5mm 256g 5%ofF.S. <0.03%
F.S./。C		 IP40
C400 10mm ±0.2mm ±43。 Φ7μm/14μm/112μm 12nm <±0.12μm Φ40*99.4mm 186g
C600 6.5mm ±0.3mm ±32.5。 Φ8μm/16μm/128μm 16nm <±0.18μm Φ20*110mm 73g
C1200 20mm ±0.6mm ±32。 Φ9.5μm/19μm/152μm 30nm <±0.3μm Φ36*106.3mm 182g
C2000 50mm ±1mm ±14。 Φ20μm/40μm/320μm 85nm <±0.6μm Φ34*90.7mm 162g 10%ofF.S. ≈0.1%
F.S./。C
C2400 9mm ±1.2mm ±60。 Φ5.5μm/11μm/88μm 45nm <±0.48μm Φ94*267.5mm 2350g 5%ofF.S. <0.03%
F.S./。C
C2600 15mm ±1.3mm ±31。 Φ9μm/18μm/144μm 50nm <±0.3μm Φ36*97.9mm 228g
C2600H 15mm ±1.3mm ±31。 Φ9μm/18μm/144μm 50nm <±0.3μm Φ36*97.9mm 228g
C3000 7mm ±1.5mm ±12.5。 Φ20μm 100nm <±0.6μm Φ8*65.7mm 23g*6 10%ofF.S. ≈0.05%
F.S./。C		 IP67
C4000N 14.5mm ±2mm ±21。 Φ12μm/24μm/192μm 100nm <±0.8μm Φ32*158.8mm 238g 5%ofF.S. <0.03%
F.S./。C		 IP40
C4000F 38mm ±2mm ±21。 Φ16μm/32μm/256μm 100nm <±0.8μm Φ36*126.1mm 226g
C6000 40mm ±3mm ±14。 Φ22μm/44μm/352μm 140nm <±1.2μm Φ30*65.3mm 112g ≈0.05%
F.S./。C
C7000 45mm ±3.5mm ±15.5。 Φ20μm/40μm/320μm 140nm <±1.4μm Φ36*84.2mm 200g <0.03%
F.S./。C
C7000L 47mm ±3.5mm ±21。 Φ16μm/32μm/256μm 140nm <±1.4μm Φ52*207mm 784g
C7000S 70mm ±3.5mm ±10。 Φ25μm/50μm/400μm 200nm <±1.4μm Φ30*84.2mm 130g
C8000 54.5mm ±4mm ±7.3。 Φ34μm / 68μm / 544μm 250nm <±1.6μm Φ23*50mm 29g
C8000(Bent) 54.5mm ±4mm ±7.3。 Φ34μm / 68μm / 544μm 250nm <±1.6μm Φ23*48.5mm
C10000 50mm ±5mm ±13。 Φ20μm/40μm/320μm 250nm <±2μm Φ36*84mm 203g
C10000H 50mm ±5mm ±13。 Φ20μm/40μm/320μm 250nm <±2μm Φ36*84mm /
C16000 55mm ±8mm ±15.3。 Φ15μm/30μm/240μm 300nm <±2μm Φ60*211.1mm 1180g
C20000 60mm ±10mm ±10.5。 Φ25μm/50μm/400μm 290nm <±2μm Φ36*163mm 310g
C20000H 60mm ±10mm ±10.5。 Φ25μm/50μm/400μm 290nm <±2μm Φ36*163mm 670g
C50000 100mm ±25mm ±9.5。 Φ25μm/50μm/400μm 850nm <±5μm Φ60*217.3mm 1154g
CR1500 Axial:3.92mm ±0.75mm ±14。 Φ20μm 80nm <±0.3μm Φ8*68.8mm 23g*6 10%ofF.S.
Radial:5.75mm Φ8*70.2mm
CR1500N Axial:1.7mm ±0.75mm ±12。 Φ17μm 100nm <±0.75μm Φ3.8*85mm 23g*6
Radial:3mm
CR4000 Axial:4.7mm ±2mm ±12.5。 Φ20μm 100nm <±1.2μm Φ8*73.1mm 59g*6
Radial:8mm
CR5000 Axial:6.75mm ±2.5mm ±13。 Φ19μm 100nm <±1μm Φ12*94.6mm 37g*6 <0.02%
F.S./。C
Radial:12mm

]
*1 Calculated from the center position of the measurement range;
*2 Tilt test using standard flat mirror at 1kHz Sampling Rate;
*3 Measurement of sharp glass edges, verified with a sub-micron positioning accuracy motion platform and laser interferometer as the displacement reference, the spot diameter values correspond to the diameters of small
spot/large spot/four-spot pattern;
*4 Measurement of standard silver-coated mirror, 1kHz without averaging, root mean square deviation of 10,000 continuous data sets;
*5 Calibration verification using high-precision nanoscale laser interferometer;
*6 This head model includes a 3m tail cable, and the weight in the table includes the weight of the cable;
*7 The CR series is available in two configurations: axial and radial light emission. The different suffixes are distinguished as follows:N for near reference distance,F for far reference distance,S for small size,L for Large size,H
for high-temperature version.

 

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