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3D Line Confocal Sensor

Line Confocal Scanning in One Step
This sensoradopts the unique line confocal scanning technology.Various forms of appearance diagrams and detailed raw datacan be obtained by only one scan on the target surface.
·3D point cloud

·2D contour image

·HD depth image

·HD grayscale image

·Dimensions/Surface roughness

·Topography/Flatness

·Defects/Thickness

·Tomography/Step height

·Gap and flush measurement

Micron-level Inspection with High Speed
·Scanning at 2,048 points/line with the minimum point interval
of 2.9μm.
·The Z-axis repeatability is up to 0.1μm,which provides you
with more accurate measurement results.
·Maximum scanning speed:35,000 lines/sec.

 

Description

3D Line Confocal Sensor(HPS-LCF Series) has broken through thelimitations of traditional measurement methods and provided an optical measurementsolution with higher accuracy and faster speed than the traditional ones for Industry4.0. It can carry out high-precision 3D inspection with submicron precision for variouscomplex objects like transparent glass, film, lithium batteries, 3C electronics products,and semiconductor components.

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Excellent performance to deal with different scenarios
Technical Parameters
HPS-LCF Sensor Head
Model HPS-LCF1000 HPS-LCF2000 HPS-LCF3000 HPS-LCF4000 HPS-LCF5000 HPS-LCF6000
Field of View (mm) 5.9 5.9 13 4.3 18.5 10.8
X-resolution (μm) 2.9 2.9 6.3 2.1 9 5.3
Z-repeatability (μm)* 0.1 0.2 0.15 0.04 0.25 0.1
Stand-off distance (mm) 16 19 59 10 61.32 16.8
Measurement range (mm) 3 2.4 6 0.7 6 3
Scan rate at full measurement range (Hz) 5000* 5000* 5000* 5000* 5800* 5000*
Max. scan rate (Hz)* 2048 2048 2048 2048 2048 2048
Number of data points/profile ±20.5–85 ±15–85 ±13.5–85 ±15.1–85 ±13–85 ±21.2–85
Max. surface slope on mirror 397×449.3×105 276×341.7×75.5 384×487.6×105 205x295x60.5 368×440.3×106 354×498.6×98
Dimensions (W*H*D) [mm] ≈19kg ≈8kg ≈20kg ≈5.4kg ≈21.3kg ≈24.5kg
Weight (kg) 35W
Power IP55
Protection degree (EN 60529) +15~+35℃
Power supply DC 24V,3.75A
Connection to the controller 40G optical fibre
Digital input Optocoupler input and output
Model HPS-LCX1000 HPS-LCX2000 HPS-LCX3000
Field of View (mm) 2.3 5.4 10
X-resolution (μm) 1.1 2.7 4.9
Z-repeatability (μm)* 0.1 0.5 0.4
Stand-off distance (mm) 9.3 27.1 22
Measurement range (mm) 1.4 2.3 6
Scan rate at full measurement range (Hz) 6500*4 5000*2 5000*
Max. scan rate (Hz)* 35000 35000 35000
Number of data points/profile ±45–85 ±25–85 ±22–85
Max. surface slope on mirror 315x454x104 160x443x80 416x424x108
Dimensions (W*H*D) [mm] ≈13kg ≈6.73kg ≈12.4kg
Weight (kg) 35W
Power IP55
Protection degree (EN 60529) +15~+35℃
Power supply DC 24V,3.75A
Connection to the controller 40G optical fibre
Digital input Optocoupler input and output
*1 This value is a 3σ value,which is obtained by measuring the minor standard gauge block on the optical platform in our company’s cleanroom. The number of contours:200 (0);integration time:300ms;Light signal intensity (Manually adjusted):20%.
*2 The number of data points/profile at this scan rate is 1024,while the scan rate will be 2500Hz with 2048 data points/profile.
*3 The number of data points/profile at this scan rate is 1024,while the scan rate will be 2600Hz with 2048 data points/profile.
*4 The number of data points/profile at this scan rate is 512,while the scan rate will be 3100Hz with 2048 data points/profile.
*5The measurement range under this scanning rate is 1/8 of the full range.
“All technical specifications are subject to the latest official datasheet. Hypersen reserves the right of final interpretation.

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3D line-scan confocal sensor for high-precision 3D measurement

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