3D Line Confocal Sensor

Description

3D Line Confocal Sensor(HPS-LCF Series) has broken through thelimitations of traditional measurement methods and provided an optical measurementsolution with higher accuracy and faster speed than the traditional ones for Industry4.0. It can carry out high-precision 3D inspection with submicron precision for variouscomplex objects like transparent glass, film, lithium batteries, 3C electronics products,and semiconductor components.

3D Line Spectral Confocal Sensors

ZIMA 3D Line Spectral Confocal Sensors feature coaxial measurement technology with built-in high-efficiency AI image recognition algorithms. Capable of both 2D profile feature recognition and 3D topography measurement — delivering height, depth, and surface data with sub-micron accuracy.

How It Works

Spectral confocal sensors use a special lens to extend the focal range of different wavelengths of light, creating a controlled chromatic aberration. Each distance from the lens corresponds to a specific wavelength of light that focuses precisely on the target surface. By measuring the wavelength of the reflected light, the exact distance to the target is determined.

Crucially, the intensity of the reflected light does not affect the measurement result — only the wavelength matters. This means that even highly light-absorbing materials such as black rubber, or transparent materials such as glass and liquids, can be measured reliably and accurately.

Ideal for Complex Materials
Transparent glass and thin film materials
Lithium battery components
3C electronics and consumer devices
Semiconductor components and wafers
Black rubber and highly absorptive surfaces
Measurement Applications
Dimensions & 3D topography
2D profile inspection
Defect & cross-section analysis
Burr and flash detection
Gap and flush measurement
Surface roughness & flatness
Thickness & step height
Volume measurement
Key Features
Coaxial measurement design for highest accuracy
Built-in AI image recognition algorithm
Circular multicolor spectrum light technology
Sub-micron measurement resolution
Measurement unaffected by surface reflectivity

Excellent performance to deal with different scenarios
Technical Parameters
HPS-LCF Sensor Head
Model	HPS-LCF1000	HPS-LCF2000	HPS-LCF3000	HPS-LCF4000	HPS-LCF5000	HPS-LCF6000
Field of View (mm)	5.9	5.9	13	4.3	18.5	10.8
X-resolution (μm)	2.9	2.9	6.3	2.1	9	5.3
Z-repeatability (μm)*	0.1	0.2	0.15	0.04	0.25	0.1
Stand-off distance (mm)	16	19	59	10	61.32	16.8
Measurement range (mm)	3	2.4	6	0.7	6	3
Scan rate at full measurement range (Hz)	5000*	5000*	5000*	5000*	5800*	5000*
Max. scan rate (Hz)*	2048	2048	2048	2048	2048	2048
Number of data points/profile	±20.5–85	±15–85	±13.5–85	±15.1–85	±13–85	±21.2–85
Max. surface slope on mirror	397x449.3x105	276x341.7x75.5	384x487.6x105	205x295x60.5	368×440.3×106	354×498.6×98
Dimensions (W*H*D) [mm]	≈19kg	≈8kg	≈20kg	≈5.4kg	≈21.3kg	≈24.5kg
Weight (kg)	35W
Power	IP55
Protection degree (EN 60529)	+15~+35℃
Power supply	DC 24V,3.75A
Connection to the controller	40G optical fibre
Digital input	Optocoupler input and output
Model	HPS-LCX1000	HPS-LCX2000	HPS-LCX3000
Field of View (mm)	2.3	5.4	10
X-resolution (μm)	1.1	2.7	4.9
Z-repeatability (μm)*	0.1	0.5	0.4
Stand-off distance (mm)	9.3	27.1	22
Measurement range (mm)	1.4	2.3	6
Scan rate at full measurement range (Hz)	6500*4	5000*2	5000*
Max. scan rate (Hz)*	35000	35000	35000
Number of data points/profile	±45–85	±25–85	±22–85
Max. surface slope on mirror	315x454x104	160x443x80	416x424x108
Dimensions (W*H*D) [mm]	≈13kg	≈6.73kg	≈12.4kg
Weight (kg)	35W
Power	IP55
Protection degree (EN 60529)	+15~+35℃
Power supply	DC 24V,3.75A
Connection to the controller	40G optical fibre
Digital input	Optocoupler input and output
*1 This value is a 3σ value,which is obtained by measuring the minor standard gauge block on the optical platform in our company’s cleanroom. The number of contours:200 (0);integration time:300ms;Light signal intensity (Manually adjusted):20%.
*2 The number of data points/profile at this scan rate is 1024,while the scan rate will be 2500Hz with 2048 data points/profile.
*3 The number of data points/profile at this scan rate is 1024,while the scan rate will be 2600Hz with 2048 data points/profile.
*4 The number of data points/profile at this scan rate is 512,while the scan rate will be 3100Hz with 2048 data points/profile.
*5The measurement range under this scanning rate is 1/8 of the full range.
“All technical specifications are subject to the latest official datasheet. Hypersen reserves the right of final interpretation.
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